The image above and the video are of STCR4160S-300-PM (with flip unit).
Characteristics
Transfer for thin wafers by using our Bernoulli type end-effector.
Energy-saving design by installing stepping motor in all axes.
Twin arm reduces the wafer swap time.
Flip unit is installed at both arms.
Base or flange mounting type is selectable.
Standard Specifications
Example of standard specifications with JEL Bernoulli end-effector.
Specifications of Robot
Robot Model
STCR4160S-300-PM
Carrying Object
SEMI standard 150, 200mm silicon wafer
Wafer Holding Method
By Cyclone pad suction and friction generated by friction rubber
(Various materials are available for contact parts.)
Robot Model Type
Cylindrical coordinate type
Control Axis
4-axis
Motor Type
Stepping motor
Operating Range
From the robot center to the wafer center
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
640mm
340deg
300mm
Carrying Speed (Ave.)
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
500mm/sec
180deg/sec
200mm/sec
Carrying Speed (Max.)
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
1230mm/sec
300deg/sec
250mm/sec
Cleanliness
ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility
Power: DC24V±10% 16A; Positive pressure air: 60 SLM or more (2-vacuum line), 0.1 to 0.3 MPa
Mass
Approx. 30kg
Specifications of Controller
Controller Model
C4000 series
Interface
RS232C and parallel photo I/O
Outline Drawing (Standard)
Option
Wrist-Block Unit
Model Name
Total Length
Mapping Sensor
Thickness of Attaching End-Effector
SART08674
60mm
2mm
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
*Click the items below to review the end-effectors other than JEL standard types.
Other Option
*The teaching box appeared in the table may be unavailable depending on the specifications.