JEL-Leading Manufacturer of Clean Robot



Robot for Semiconductor

STCR4160S (with flip unit)4-Axis Cylindrical Coordinate Clean Robot

STCR4160S-300-PM(with flip unit)

Product Video

Usage Environment/Specifications

Product Profile

Model NameSTCR4160S
EnvironmentClean room atmosphere
ArmTwin arm
Operating Range315mm (3rd joint center)
Vertical Stroke200mm / 300mm / 400mm / 450mm / 500mm / 550mm / 600mm
Payload Capacity3kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
STCR4160S-200-PM200mm
STCR4160S-300-PM300mm
STCR4160S-400-PM400mm
STCR4160S-450-PM450mm
STCR4160S-500-PM500mm
STCR4160S-550-PM550mm
STCR4160S-600-PM600mm
  • The image above and the video are of STCR4160S-300-PM (with flip unit).

Characteristics

  • Transfer for thin wafers by using our Bernoulli type end-effector.
  • Energy-saving design by installing stepping motor in all axes.
  • Twin arm reduces the wafer swap time.
  • Flip unit is installed at both arms.
  • Base or flange mounting type is selectable.

Standard Specifications

Example of standard specifications with JEL Bernoulli end-effector.
Specifications of Robot
Robot Model STCR4160S-300-PM
Carrying Object SEMI standard  150, 200mm silicon wafer
Wafer Holding Method By Cyclone pad suction and friction generated by friction rubber
(Various materials are available for contact parts.)
Robot Model Type Cylindrical coordinate type Control Axis 4-axis
Motor Type Stepping motor
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
640mm 340deg 300mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
500mm/sec 180deg/sec 200mm/sec
Carrying Speed (Max.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
1230mm/sec 300deg/sec 250mm/sec
Cleanliness ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility Power: DC24V±10% 16A; Positive pressure air: 60 SLM or more (2-vacuum line), 0.1 to 0.3 MPa
Mass Approx. 30kg
Specifications of Controller
Controller Model C4000 series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)
STCR4160S-300-PM(with flip unit)

Option

Wrist-Block Unit
Model Name Total Length Mapping Sensor Thickness of Attaching End-Effector
SART08674 60mm   2mm

*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.


Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking