Robot for Semiconductor
STCR4160SN (Closed-loop control)4-Axis Cylindrical Coordinate Clean Robot
Product Video
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Usage Environment/Specifications
Product Profile
| Model Name | STCR4160SN |
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| Environment | Clean room atmosphere |
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| Arm | Twin arm |
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| Operating Range | 315mm (3rd joint center) |
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| Vertical Stroke | 200mm / 300mm / 400mm / 450mm / 500mm |
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| Payload Capacity | 3kg (calculated for the arm 3rd joint) |
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List of Product Model
| Product Model | Vertical Stroke |
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| STCR4160SN-200-CM | 200mm |
| STCR4160SN-300-CM | 300mm |
| STCR4160SN-400-CM | 400mm |
| STCR4160SN-450-CM | 450mm |
| STCR4160SN-500-CM | 500mm |
- The image above is of STCR4160SN-300-CM and the video shows STCR4160SN-300-PM.
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Characteristics
New type of 4-axis cylindrical coordinate type twin-arm clean robot
For handling wafers from 2 inch to 300mm with low-cost, high-speed handling, and no step-out error
- High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration.
- Reduced origin search time: By absolute encoder
- Equipped with the batteryless multi-rotation absolute sensor
- Robot replacement is available: Compatible with conventional model (installation/performance)
- High rigidity: Payload capacity of 3kg (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
- Arm lineup: 100mm, 130mm, 160mm, 200mm
- Base or flange mounting type is selectable according to the customer’s system layout.
- Bernoulli end-effector is available (option)
Standard Specifications
Example of specifications with JEL standard end-effector (vacuum type)
| Robot Model |
STCR4160SN-300-CM |
| Carrying Object |
Wafer up to 300mm (Available for various types of wafers) |
| Wafer Holding Method |
By vacuum suction |
| Robot Model Type |
Cylindrical coordinate type |
Control Axis |
4-axis |
| Motor Type |
Stepping motor (Closed-loop) |
| Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 575mm |
340deg |
300mm |
| Carrying Speed (Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 570mm/sec |
220deg/sec |
200mm/sec |
| Carrying Speed (Max.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 1140mm/sec |
270deg/sec |
250mm/sec |
| Resolution |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| Below 10.0µm |
0.0015deg |
2.0µm |
| Repeatability |
Within ±0.1mm |
| Cleanliness |
ISO Class 2 (at wafer transfer level when exhausting driving part) |
| Utility |
Power: DC24V±10% 10A Vacuum: -53kPa or more |
| Mass |
Approx. 30kg |
| Controller Model |
C4000B series |
| Interface |
RS232C and parallel photo I/O |
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Option
Wrist-Block Unit
| Model Name |
Total Length |
Mapping Sensor |
Thickness of Attaching End-Effector |
| SART08674 |
60mm |
|
2mm |
| SART08604 |
60mm |
|
2mm |
| SART08675 |
155mm |
|
2mm |
| SART08661 |
155mm |
Available |
2mm |
| SART08676 |
60mm |
|
2mm |
| SART08668 |
60mm |
Available |
2mm |
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
| Model Name |
Size of Carrying Object |
End-effector Type (Thickness) |
Wafer Holding Method |
| SC-IW-200 |
3 inch, 100mm to 200mm |
I-shape (2mm) |
Vacuum suction |
| SC-IW-240 |
3 inch, 100mm to 300mm |
I-shape (2mm) |
Vacuum suction |
| SC-YW-200 |
100mm to 200mm |
Y-shape (2mm) |
Vacuum suction |
| SC-YW-227 |
100mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
| SC-YW-240 |
100mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
| 3D-02229 |
150mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
| SC3-YW-240 |
300mm |
Y-shape (3mm) |
Vacuum suction |
| 3D-01661 |
300mm |
Y-shape (3mm) |
Vacuum suction |
| SC3-IW-240 |
300mm |
I-shape (3mm) |
Vacuum suction |
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Operating Range
| End-Effector/Wrist-Block Unit |
SART08674 |
SART08604 |
SART08675 |
SART08661 |
SART08676 |
SART08668 |
| SC-IW-200 |
525mm |
525mm |
620mm |
620mm |
525mm |
525mm |
| SC-IW-240 |
565mm |
565mm |
660mm |
660mm |
565mm |
565mm |
| SC-YW-200 |
535mm |
535mm |
630mm |
630mm |
535mm |
535mm |
| SC-YW-227 |
535mm |
535mm |
630mm |
630mm |
535mm |
535mm |
| SC-YW-240 |
575mm |
575mm |
670mm |
670mm |
575mm |
575mm |
| 3D-02229 |
575mm |
575mm |
670mm |
670mm |
575mm |
575mm |
| SC3-YW-240 |
575mm |
575mm |
670mm |
670mm |
575mm |
575mm |
| 3D-01661 |
575mm |
575mm |
670mm |
670mm |
575mm |
575mm |
SC3-IW-240 |
565mm |
565mm |
660mm |
660mm |
565mm |
565mm |
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.
Other Option
Product Lineup
