System
SORTER SYSTEM (4-port inline type with 300 wafers/h throughput)
Product Video
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Usage Environment/Specifications
Product Profile
Product Model | SORTER SYSTEM |
Environment | Clean room atmosphere |
Wafer Size | 300mm |
Carrying Object | Silicon wafer |
Contact us for the detailed specifications. |
Throughput | 300 wafers/h |
- The image above and the video are of SORTER SYSTEM (4-port inline type with 300 wafers/h throughput).
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Characteristics
- Compliance : SEMI Standard (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600)
- Aligner with buffer function is available for high-throughput.
- Wafer ID reader is available. (Reading both sides of wafer is an option)
Standard Specifications
Standard specifications for 4-port inline type (Robot 1 set, Track 1 set)
Carrier |
300mm FOUP (for 25 wafers) Compliance: SEMI E47.1, E62 |
Carrying Object |
300mm Silicon wafer (Thickness: 775µm)
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Throughput |
300 wafers/h
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Cleanliness |
ISO Class 2 (when equipped with FFU)
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Dimension |
W 1250mm x D 2500mm x H 1900mm
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Mass |
Approx. 800kg
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Utility |
Power: AC200V Single phase ±10% 2kVA |
Dry air: 0.5MPa±10% |
Vacuum: -53kPa or more |
Option
Other Option
*The teaching box appeared in the table may be unavailable depending on the specifications.
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