Robot for Semiconductor
SCR3160CS3-Axis Cylindrical Coordinate Clean Robot
Product Video
VIDEO
Usage Environment/Specifications
Product Profile
Model Name SCR3160CS
Environment Clean room atmosphere
Arm Single arm
Operating Range 340mm (3rd joint center)
Vertical Stroke 200mm / 300mm / 400mm / 450mm / 500mm / 550mm / 600mm
Payload Capacity 3kg (calculated for the arm 3rd joint)
List of Product Model
Product Model Vertical Stroke
SCR3160CS-200-PM 200mm
SCR3160CS-300-PM 300mm
SCR3160CS-400-PM 400mm
SCR3160CS-450-PM 450mm
SCR3160CS-500-PM 500mm
SCR3160CS-550-PM 550mm
SCR3160CS-600-PM 600mm
The image is of SCR3100CS-200-PM and the video is of SCR3160CS-300-PM.
Characteristics
Designed for handling small wafers in a production line or inspection line of semiconductor.
Arm lineup: 100mm, 130mm, 160mm, 200mm
Base or flange mounting type is selectable.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
2-phase stepping motor installed in all axes.
High-speed, high-accuracy wafer handlingby S-curved speed control.
Wafer holding: end-effector with vacuum suction, passive edge, edge grip type End-effector.
End-effector material: CFRP, Al, ceramic, or others.
Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Example of standard specifications with JEL standard end-effector (vacuum type)
Robot Model
SCR3160CS-300-PM
Carrying Object
Wafer up to 300mm
Wafer Holding Method
By vacuum suction
Robot Model Type
Cylindrical coordinate type
Control Axis
3-axis
Motor Type
Stepping motor
Operating Range
From the robot center to the wafer center
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
502.7mm
340deg
300mm
Carrying Speed (Ave.)
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
610mm/sec
340deg/sec
250mm/sec
Carrying Speed (Max.)
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
1220mm/sec
500deg/sec
320mm/sec
Resolution
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
Below 12.6µm
0.0045deg
6.25µm
Repeatability
Within ±0.1mm
Cleanliness
ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility
Power: DC24V±10% 15A; Vacuum: -53kPa or more
Mass
Approx. 25kg
Controller Model
C4000 series
Interface
RS232C and parallel photo I/O
Option
Wrist-Block Unit
Model Name
Total Length
Mapping Sensor
Thickness of Attaching End-Effector
SARS00169
38mm
None
2mm
SARS00958
38mm
None
3mm
SARS02659
75mm
None
2mm
SARS02967
75mm
None
3mm
SARS08603
80mm
Transmissive sensor/Reflective sensor
2mm
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
Model Name
Size of Carrying Object
End-effector Type (Thickness)
Wafer Holding Method
SC-IW-200
3 inch, 100mm to 200mm
I-shape (2mm)
Vacuum suction
SC-IW-240
3 inch, 100mm to 300mm
I-shape (2mm)
Vacuum suction
SC-YW-200
100mm to 200mm
Y-shape (2mm)
Vacuum suction
SC-YW-227
100mm to 300mm
Y-shape (2mm)
Vacuum suction
SC-YW-240
100mm to 300mm
Y-shape (2mm)
Vacuum suction
3D-02229
150mm to 300mm
Y-shape (2mm)
Vacuum suction
SC3-YW-240
300mm
Y-shape (3mm)
Vacuum suction
3D-01661
300mm
Y-shape (3mm)
Vacuum suction
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Operating Range
End-Effector/Wrist-Block Unit
SARS00169
SARS02659
SARS08603
SARS00958
SARS02967
SC-IW-200
357.7mm
420mm
425mm
-
-
SC-IW-240
397.7mm
460mm
465mm
-
-
SC-YW-200
367.7mm
430mm
435mm
-
-
SC-YW-227
394.7mm
457mm
462mm
-
-
SC-YW-240
407.7mm
470mm
475mm
-
-
3D-02229
407.7mm
470mm
475mm
-
-
SC3-YW-240
-
-
-
407.7mm
470mm
3D-01661
-
-
-
407.7mm
470mm
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.
Other Option
*The teaching box appeared in the table may be unavailable depending on the specifications.
Product Lineup