JEL-Leading Manufacturer of Clean Robot



Robot for Semiconductor

SCR3100S (For small wafer)3-Axis Cylindrical Coordinate Clean Robot

SCR3100S-PM

Product Video

Usage Environment/Specifications

Product Profile

Model NameSCR3100S
EnvironmentClean room atmosphere
ArmSingle arm
Operating Range195mm (3rd joint center)
Vertical Stroke200mm / 300mm
Payload CapacityBelow 0.5kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
StandardSCR3100S-200-PM200mm
StandardSCR3100S-300-PM300mm
  • The image above and the video are of SCR3100S-200-PM.

Characteristics

Designed for handling small wafers in a production line or inspection line of semiconductor.
Minimized footprint compactifies the system layout.

  • Base or flange mounting type is selectable.
  • Motion monitoring is available.
  • RS232C and parallel photo I/O are standard for control.
  • 2-phase stepping motor installed in all axes.
  • High-speed, high-accuracy wafer handlingby S-curved speed control.
  • Wafer holding: end-effector with vacuum suction, passive edge, edge grip type End-effector.
  • End-effector material: CFRP, Al, ceramic, or others.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with JEL standard end-effector (vacuum type)
Specifications of Robot
Robot Model SCR3100S-200-PM
Carrying Object Up to 150mm wafer
Wafer Holding Method By vacuum suction
Robot Model Type Cylindrical coordinate type Control Axis 3-axis
Motor Type Stepping motor
Operating Range (Ave.) From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
397.7mm 340deg 200mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
330mm/sec 280deg/sec 130mm/sec
Carrying Speed (Max.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
500mm/sec 480deg/sec 170mm/sec
Repeatability Within ±0.1mm
Cleanliness ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility Power: DC24V±10% 8A; Vacuum: -53kPa or more
Specifications of Controller
Controller Model C4000 series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)
SCR3100S-200-PM

Option

Wrist-Block Unit
Model Name Total Length Mapping Sensor Thickness of Attaching End-Effector
SARS00169 38mm None 2mm
SARS00958 38mm None 3mm
SARS02659 75mm None 2mm
SARS02967 75mm None 3mm
SARS08603 80mm Transmissive sensor/Reflective sensor 2mm

*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.

End-Effector
Model Name Size of Carrying Object End-effector Type (Thickness) Wafer Holding Method
SC-IW-200 3 inch, 100mm to 200mm I-shape (2mm) Vacuum suction
SC-IW-240 3 inch, 100mm to 300mm I-shape (2mm) Vacuum suction
SC-YW-200 100mm to 200mm Y-shape (2mm) Vacuum suction
SC-YW-227 100mm to 300mm Y-shape (2mm) Vacuum suction
SC-YW-240 100mm to 300mm Y-shape (2mm) Vacuum suction
3D-02229 150mm to 300mm Y-shape (2mm) Vacuum suction
SC3-YW-240 300mm Y-shape (3mm) Vacuum suction
3D-01661 300mm Y-shape (3mm) Vacuum suction

*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.

Operating Range
End-Effector/Wrist-Block Unit SARS00169 SARS02659 SARS08603 SARS00958 SARS02967
SC-IW-200 357.7mm 420mm 425mm - -
SC-IW-240 397.7mm 460mm 465mm - -
SC-YW-200 367.7mm 430mm 435mm - -
SC-YW-227 394.7mm 457mm 462mm - -
SC-YW-240 407.7mm 470mm 475mm - -
3D-02229 407.7mm 470mm 475mm - -
SC3-YW-240 - - - 407.7mm 470mm
3D-01661 - - - 407.7mm 470mm
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.


Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking