SC3-IW-240Vacuum Type End-Effector
|Carrying Object||Mainly silicon wafer|
I-shaped vacuum suction type end-effector, suitable for handling 300mm wafer (Random access is available).
Used extensively for atmospheric robot, the end-effector holds the backside of wafer by vacuum suction (negative pressure).
Conductive Teflon coating on the surface of end-effector protects against damage from charging.
||SEMI standard 300mm (Mainly silicon wafer)
||High purity alumina ceramic sintered body
||Conductive Teflon coating
|Wafer Holding Method
Please contact us for the detailed specifications.