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SC-IW-200Vacuum Type End-Effector

Usage Environment/Specifications

Product Profile

Model Name	SC-IW-200
Carrying Size	3 inch, 100 to 200mm
Carrying Object	Mainly silicon wafer

Characteristics

I-shaped vacuum suction type end-effector, suitable for handling wafer up to 200mm (Random access is available).
Used extensively for atmospheric robot, the end-effector holds the backside of wafer by vacuum suction (negative pressure).
Conductive Teflon coating on the surface of end-effector protects against damage from charging.

Standard Specifications

Carrying Object	SEMI standard 3 inch, 100 to 200mm (Mainly silicon wafer)
Material	High purity alumina ceramic sintered body
Surface Treatment	Conductive Teflon coating
Wafer Holding Method	Vacuum suction
Total Length	200mm
Thickness	2mm

Please contact us for the detailed specifications.

Outline Drawing (Standard)

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking