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SARS08603Wrist-block unit with mapping sensor

Usage Environment/Specifications


Product Profile

Model NameSARS08603
Appropriate robot modelSCR series

Characteristics

Designed for checking the wafer state in cassette.
Also available for sorter system.

  1. Wrist-block unit with mapping sensor (*) for SCR series
  2. Standard end-effectors (6 types) are available for this wrist-block (refer to the following table).

(*) Mapping sensor is to detect wafer presence and status in each cassette slot.


Standard end-effectors available for the wrist-block

Click the product image or name below to go to the product page.

SC-IW-200 SC-IW-240 SC3-IW-240 SC-YW-227
SC-YW-200 3D-02229

Specifications

Contact us for the detailed specifications.


Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking