JEL-Leading Manufacturer of Clean Robot



Robot for Semiconductor

MTCR4160L (with batch end-effector for 5 pieces of wafer) 

MTCR4160L (with batch end-effector for 5 pieces of wafer)

Product Video

Usage Environment/Specifications

Product Profile

Product ModelMTCR4160L
EnvironmentClean room atmosphere
ArmTwin arm
Operating Range710mm (Robot center to wafer center)
Vertical Stroke700mm

List of Product Model

Product ModelVertical Stroke
MTCR4160L-700-AM700mm
  • The image above and the video are of MTCR4160L-700-AM (with batch end-effector for 5 pieces of wafer)

Characteristics

High-speed handling of cassette with different pitches for such as vertical furnace.
Execution of origin search is not required by using the servo motors with absolute encoders.

  • Suitable for the system with low-passline and long vertical stroke.
  • Highly flexible layout is provided with rotation angle of ±160 deg. by column-type driving unit.
  • Pitch shifting of end-effector can be freely set in the range of 5mm to 10mm.

Standard Specifications

Specifications of MTCR4160L-700-AM. It can be changed depending on the carrying object and end-effector type.

(*1) Specifications when wafer is held by a rough guide with passive edge holding.
       Other holding method such as vacuum suction is available. Contact us for the detailed specifications.
Specifications of Robot
Robot Model MTCR4160L-700-AM
Carrying Object 300mm silicon wafer
Wafer Holding Method Rough guide by passive edge holding
Robot Model Type Cylindrical coordinate type Control Axis 4-axis
Motor Type AC servo motor
Operating Range (*1) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
710mm ±160deg 700mm
Carrying Speed (Ave.) (*1) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
415mm/sec 135deg/sec 350mm/sec
Carrying Speed (Max.) (*1) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
830mm/sec 190deg/sec 500mm/sec
Resolution Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
Below 6.55µm 0.00082deg 4.89µm
Handling Level 676mm (Lowest slot)
Repeatability ±0.1mm
Cleanliness ISO Class 2 (ISO14644)(at wafer transfer level when exhausting driving part)
Utility Power: AC200V Single phase ±10%
Mass Robot main body: Approximately 180 kg
Specifications of Controller
Controller Model C5000S series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)
MTCR4160L (5枚一括可変チャック搭載仕様)



Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking