JEL-Leading Manufacturer of Clean Robot



Robot for FPD

LVHR3440S (FPD glass substrate)3-Axis Cylindrical Coordinate Clean Robot

LVHR3440S-040-SM

Usage Environment/Specifications

Product Profile

Model NameLVHR3440S
EnvironmentClean room atmosphere (Temp. 15°C to 40°C)
*Vacuum robot:vacuum chamber temp. 15°C to 50°C or less
ArmSingle arm
Operating Range880mm (3rd joint center)
Vertical Stroke20mm/ 32mm/ 40mm/ 60mm/ 320mm
Payload CapacityBelow 10kgf (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
LVHR3440S-020-SM20mm
LVHR3440S-032-SM32mm
LVHR3440S-040-SM40mm
LVHR3440S-060-SM60mm
LVHR3440S-320-SM320mm
  • The image above is of LVHR3440S-040-SM.

Characteristics

Designed for handling FPD substrate in a PFD production line or inspection line.

  • Arm lineup: 330mm, 440mm, 500mm, 550mm
  • Magnetic fluid sealing are used for arm joint.
  • Vacuum sealing: Magnetic fluid sealing and bellows are used.
  • For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
  • Motion monitoring is available.
  • RS232C and parallel photo I/O are standard for control.
  • AC servo motors with absolute encoders installed in all axes.
  • High-speed, high-accuracy glass handling by S-curved speed control.
  • Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector
  • End-effector material: CFRP, Al, ceramic, or others.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Representative specifications of LVHR3440S-040-SM.
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model LVHR3440S-040-SM
Carrying Object 730mm×920mm×1.1mm FPD glass substrate(representative example)
Robot Model Type Cylindrical coordinate type Control Axis 3-axis
Motor Type AC servo motor
Operating Range 3rd joint center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
880mm ±182deg 40mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
1320mm/2.7sec 180deg/1.8sec 40mm/2.0sec
Resolution Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
Below 13.5µm 0.00097deg 0.61µm
Handling level 168.5mm (Mounting level to upper end-effector level
Repeatability Within ±0.2mm
Cleanliness Magnetic fluid sealing and filter
Utility Power: AC200V single phase ±10% 2kVA
Outline Drawing (Standard)
LVHR3440S-040-SM

Option

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking