JEL-Leading Manufacturer of Clean Robot



Robot for Semiconductor

GCR4210 (Stepping motor type)4-Axis Horizontal and Multi-Joint Type Clean Robot

GCR4210(Stepping motor type)

Product Video

Usage Environment/Specifications

Product Profile

Model NameGCR4210
EnvironmentClean room atmosphere
ArmSingle arm
Operating Range400mm (3rd joint center)
Vertical Stroke300mm
Payload CapacityBelow 3kgf (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
GCR4210-300-PM300mm
  • The image above and the video are of GCR4210-300-PM.

Characteristics

Designed for handling 300mm wafers in a production line or inspection line of semiconductor.

  • 2 FOUP access is available without a track.
  • Base or flange mounting type is selectable.
  • Motion monitoring available.
  • RS232C and parallel photo I/O are standard for control.
  • 2-phase stepping motor with absolute encoders installed in all axes.
  • High-speed, high-accuracy wafer handling by S-curved speed control.
  • Offset movement is 1.4 times faster compared to GHR4000 type.
  • Wafer holding: end-effector with vacuum suction, passive edge, or edge grip.
  • End-effector material: CFRP, Al, ceramic, or others.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with JEL standard end-effector (vacuum type)
Specifications of Robot
Robot Model GCR4210-300-PM
Carrying Object Up to 300mm silicon wafer
Wafer Holding Method By vacuum suction
Robot Model Type Horizontal and multi-joint type Control Axis 4-axis
Motor Type Stepping motor type
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
760mm 335deg 300mm
Carrying Speed Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
730mm/1.0sec 240deg/1.0sec 200mm/1.0sec
Repeatability Within ±0.1mm
Cleanliness ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility Power: DC24V±10% 15A; Vacuum: -53kPa or more
Mass Approx. 26kg
Specifications of Controller
Controller Model C4451 series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)
GCR4210-300-PM

Option

Wrist-Block Unit
Model Name Total Length Mapping Sensor Thickness of Attaching End-Effector
SARS00169 38mm None 2mm
SARS00958 38mm None 3mm
SARS02659 75mm None 2mm
SARS02967 75mm None 3mm
SARS08603 80mm Transmissive sensor/Reflective sensor 2mm

*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.

End-Effector
Model Name Size of Carrying Object End-effector Type (Thickness) Wafer Holding Method
SC-IW-200 3 inch, 100mm to 200mm I-shape (2mm) Vacuum suction
SC-IW-240 3 inch, 100mm to 300mm I-shape (2mm) Vacuum suction
SC-YW-200 100mm to 200mm Y-shape (2mm) Vacuum suction
SC-YW-227 100mm to 300mm Y-shape (2mm) Vacuum suction
SC-YW-240 100mm to 300mm Y-shape (2mm) Vacuum suction
3D-02229 150mm~300mm Y-shape (2mm) Vacuum suction
SC3-YW-240 300mm Y-shape (3mm) Vacuum suction
3D-01661 300mm Y-shape (3mm) Vacuum suction
SC3-IW-240 300mm I-shape (3mm) Vacuum suction

*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.

Operating Range
End-Effector/Wrist-Block Unit SARS00169 SARS02659 SARS08603 SARS00958 SARS02967
SC-IW-200 562.7mm 625mm 630mm - -
SC-IW-240 602.7mm 665mm 670mm - -
SC-YW-200 572.7mm 635mm 640mm - -
SC-YW-227 599.7mm 662mm 667mm - -
SC-YW-240 612.7mm 675mm 680mm - -
3D-02229 612.7mm 675mm 680mm - -
SC3-YW-240 - - - 612.7mm 675mm
3D-01661 - - - 612.7mm 675mm
SC3-IW-240 - - - 602.7mm 665mm
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.


Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking