Robot for Semiconductor
GCR4210 (AC servo motor)4-Axis Horizontal and Multi-Joint Type Clean Robot
Product Video
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Usage Environment/Specifications
Product Profile
| Model Name | GCR4210 |
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| Environment | Clean room atmosphere |
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| Arm | Single arm |
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| Operating Range | 400mm (3rd joint center) |
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| Vertical Stroke | 300mm / 320mm / 500mm |
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| Payload Capacity | Below 4kg (calculated for the arm 3rd joint) |
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List of Product Model
| Product Model | Vertical Stroke |
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| GCR4210-300-AM | 300mm |
| GCR4210-320-AM | 320mm |
| GCR4210-500-AM | 500mm |
- The image above and the video are of GCR4210-300-AM.
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Characteristics
Designed for handling 300mm wafers in a production line or inspection line of semiconductor.
Execution of origin search is not required by using the servo motors with absolute encoders.
- 2 FOUP access is available without a track.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- AC servo motors with absolute encoders installed in all axes
- RS232C and parallel photo I/O are standard for control.
- High-speed, high-accuracy wafer handling by S-curved speed control and optimizing pass control.
- 1.8 times faster compared to GHR4206 type.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Example of standard specifications with JEL standard end-effector (vacuum type)
| Robot Model |
GCR4210-300-AM |
| Carrying Object |
Up to 300mm silicon wafer |
| Wafer Holding Method |
By vacuum suction |
| Robot Model Type |
Horizontal and multi-joint type |
Control Axis |
4-axis |
| Motor Type |
AC servo motor |
| Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 760mm |
335deg |
300mm |
| Carrying Speed |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 635mm/0.8sec |
335deg/1.0sec |
300mm/0.9sec |
| Repeatability |
Within ±0.1mm |
| Cleanliness |
ISO Class 2 (at wafer transfer level when exhausting driving part) |
| Utility |
Power: AC200V Single phase ±10% 2kVA; Vacuum: -53kPa or more |
| Mass |
Approx. 37kg |
| Controller Model |
C5000S series |
| Interface |
RS232C and parallel photo I/O |
Option
Wrist-Block Unit
| Model Name |
Total Length |
Mapping Sensor |
Thickness of Attaching End-Effector |
| SARS00169 |
38mm |
None |
2mm |
| SARS00958 |
38mm |
None |
3mm |
| SARS02659 |
75mm |
None |
2mm |
| SARS02967 |
75mm |
None |
3mm |
| SARS08603 |
80mm |
Transmissive sensor/Reflective sensor |
2mm |
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
| Model Name |
Size of Carrying Object |
End-effector Type (Thickness) |
Wafer Holding Method |
| SC-IW-200 |
3 inch, 100mm to 200mm |
I-shape (2mm) |
Vacuum suction |
| SC-IW-240 |
3 inch, 100mm to 300mm |
I-shape (2mm) |
Vacuum suction |
| SC-YW-200 |
100mm to 200mm |
Y-shape (2mm) |
Vacuum suction |
| SC-YW-227 |
100mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
| SC-YW-240 |
100mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
| 3D-02229 |
150mm～300mm |
Y-shape (2mm) |
Vacuum suction |
| SC3-YW-240 |
300mm |
Y-shape (3mm) |
Vacuum suction |
| 3D-01661 |
300mm |
Y-shape (3mm) |
Vacuum suction |
| SC3-IW-240 |
300mm |
I-shape (3mm) |
Vacuum suction |
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Operating Range
| End-Effector/Wrist-Block Unit |
SARS00169 |
SARS02659 |
SARS08603 |
SARS00958 |
SARS02967 |
| SC-IW-200 |
562.7mm |
625mm |
630mm |
- |
- |
| SC-IW-240 |
602.7mm |
665mm |
670mm |
- |
- |
| SC-YW-200 |
572.7mm |
635mm |
640mm |
- |
- |
| SC-YW-227 |
599.7mm |
662mm |
667mm |
- |
- |
| SC-YW-240 |
612.7mm |
675mm |
680mm |
- |
- |
| 3D-02229 |
612.7mm |
675mm |
680mm |
- |
- |
| SC3-YW-240 |
- |
- |
- |
612.7mm |
675mm |
| 3D-01661 |
- |
- |
- |
612.7mm |
675mm |
| SC3-IW-240 |
- |
- |
- |
602.7mm |
665mm |
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.
Other Option
Product Lineup
