JEL-Leading Manufacturer of Clean Robot



Robot for Semiconductor

GCR4210 (Robot with end-effectors with rotation function)

GCR4210 (Robot with end-effectors with rotation function)

Product Video

Usage Environment/Specifications

Product Profile

Model NameGCR4210
EnvironmentClean room atmosphere
ArmSingle arm (Twin end-effector)
Operating Range400 mm (3rd joint center)
Vertical Stroke300 mm
Payload Capacity4 kgf (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
GCR4210-300-AM300 mm
  • The image above and the video are of GCR4210-300-AM(with end-effectors with rotation function).

Characteristics

4-axis horizontal and multi-joint type robot designed for handling wafers in a production line or inspection line of semiconductor. Execution of origin search is not required by using the servo motors with absolute encoders.
Rotation function on end-effector units shortens tact time.
Wafer swapping without arm extending/retracting movement.

  • RS232C and parallel photo I/O are standard for control.
  • AC servo motors with absolute encoders installed in all axes
  • High-speed, high-accuracy wafer handling by S-curved speed control and optimizing pass control.
  • AC servo motor or 2-phase pulse motor type is selectable.

Standard Specifications

Standard specifications of GCR4210-300-AM (with end-effectors with rotation function)
Specifications of Robot
Robot Model GCR4210-300-AM
Carrying Object Up to 300 mm silicon wafer
Wafer Holding Method By vacuum suction with end-effectors
Robot Model Type Horizontal and multi-joint type Control Axis 4-axis
Motor Type AC servo motor
Operating Range From robot center to wafer center Rotation Angle(θ-axis) Vertical Stroke (Z-axis)
640 mm 335 deg 300 mm
Rotation angle of wrist-block
±180 deg
Carrying Speed Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
430 mm/0.8 sec 335 deg/1.0 sec 300 mm/0.9 sec
Resolution 1st Joint Axis 2nd Joint Axis 3rd Joint Axis
0.0015 deg 0.0018 deg 0.0018 deg
Z-axis  
1.96 µm  
Repeatability Within ±0.1 mm
Cleanliness ISO Class 2 or less (at wafer transfer level when exhausting driving area)
Utility Power: AC200V Single phase ±10% 2 kVA
Vacuum: -53 kPa or more
Mass Robot main body: Approx. 37 kg
Specifications of Controller
Controller Model C5000S series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)
Drawing of GCR4210-300-AM (with end-effectors with rotation function)

Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking