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Small wafer handling robots for MEMS device · LED wafer

Minimize footprint from 240mm into 160mm compared to the existing model(SCR)
240mm160mm

At present, LED market is expected to grow in demand for public facilities and general illumination.
For 2-6 inch wafer handling such as LED or compound semiconductor, the small type of robot : SCR3100S has been developed with the concept of less space and low cost.
In addition to the robot, the new Aligner SAL2241 line-up is also available for 2-4 inch wafer or transparent wafer handling.

We can demonstrate the above models in JEL Fukuyama factory.
Please contact us for demonstration or document request.