SEMICON Japan 2014
Thank you very much for coming to our exhibition booth. For more information on our products as well as the exhibited products below, please go to the product page or contact us.
Date: Dec. 3, 2014
Date: Wed., December 3 - Fri., December 5, 2014
Venue: Tokyo Big Sight, Japan
JEL booth No.: East Exhibition Hall 4 4182 (Near the center of Hall 4)
Products for Exhibition
Automatic wafer transfer system for wafer container
High accuracy handling of thin wafer inside the wafer container.
Logger system
Suitable for the verification of an error such as wafer breakage.
Clean robot with batch end-effector for 5 pieces of wafer
High-speed handling of cassette with different pitches for such as vertical furnace.
Robots for handling 2 inch wafer
Help to minimize transferring parts or vacuum transfer chamber.
Robot for handling petri dishes
Suitable for handling in sterile room, or clean environment used for medical and biotechnology applications.