SEMICON China 2014
Thank you for coming to SEMICON China 2014.
For more product information, please go to the products page or contact us.
Date: March 18-20, 2014
Venue: Shanghai New International Exhibition Centre, China
Booth: N2 2225
Date: Mar. 19, 2014
Products for Exhibition
Clean robot for handling wafer:
MTCR4160C-300-AM
・Twin arm clean robot using AC servo motor
High-speed handling of wafer and handling of tray/susceptor are available.
Clean robot for handling wafer:
SCR3160CS-300-PM
・Low cost main product of JEL
Optional flip function is available.
Bernoulli type end-effector and Bernoulli hand for thin or warped wafer:
Bernoulli Hand: BRP-01
・Low-cost Bernoulli type end-effector available for customization
Visitors experienced the Bernoulli type wafer holding at the exhibition.